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Tantalum Sputtering Target Properties and Applications
Tantalum is a dark blue-grey metal that is very heavy, ductile and hard and has high corrosion resistance. Tantalum is especially resistant to chemicals at temperatures below 150 °C and can only be dissolved with hydrofluoric acid. It has the fourth highest melting point of all metals and is able to form extremely thin and protective oxide layers for high-quality capacitors, making it an excellent material for sputtering targets. Tantalum sputtering targets are used in integrated circuits and Thin Film Transistor Liquid Crystal Display.
